US Patent 8298336 High strip rate downstream chamber
Patent 8298336 was granted and assigned to Lam Research on October, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 1, 2005
0
Date of Patent
October 30, 2012
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Patent Application Number
11096820
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Patent Citations Received
Patent Inventor Names
Ing-Yann Wang
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Robert P. Chebi
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David J. Cooperberg
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Erik A. Edelberg
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Jaroslaw W. Winniczek
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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