US Patent 8270141 Electrostatic chuck with reduced arcing
Patent 8270141 was granted and assigned to Applied Materials on September, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 17, 2010
0
Date of Patent
September 18, 2012
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Patent Application Number
12884967
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Patent Inventor Names
David Palagashvili
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Michael D. Willwerth
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Michael G. Chafin
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Douglas A. Buchberger, Jr.
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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