Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Moshe E. Preil0
Alex N. Hegyi0
Daniel S. Abrams0
Date of Patent
September 4, 2012
Patent Application Number
12475338
Date Filed
May 29, 2009
Patent Primary Examiner
Patent abstract
A system receives a mask pattern and a first image of at least a portion of a photo-mask corresponding to the mask pattern. The system determines a second image of at least the portion of the photo-mask based on the first image and the mask pattern. This second image is characterized by additional spatial frequencies than the first image.
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