Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Gang Liu0
James Clark0
David J. Michael0
Date of Patent
April 24, 2012
0Patent Application Number
115085510
Date Filed
August 23, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The invention provides, in some aspects, a wafer alignment system comprising an image acquisition device, an illumination source, a rotatable wafer platform, and an image processor that includes functionality for mapping coordinates in an image of an article (such as a wafer) on the platform to a “world” frame of reference at each of a plurality of angles of rotation of the platform.
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