US Patent 8161803 Micromachined comb drive for quantitative nanoindentation
Patent 8161803 was granted and assigned to Hysitron, Inc. on April, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 6, 2009
Date of Patent
April 24, 2012
Patent Application Number
12497834
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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