Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
April 3, 2012
Patent Application Number
12337716
Date Filed
December 18, 2008
Patent Primary Examiner
Patent abstract
An electromagnetic micro-pump includes a substrate, a top plate, a magnetic diaphragm, and a coil unit. The substrate includes a first face and a second face. The first face includes a groove. The top plate is mounted on the first face of the substrate. The top plate includes an input hole, an output hole, and a through-hole. Each of the input hole, the output hole, and the through-hole extends through the top plate and is in communication with the groove. The through-hole is between the input hole and the output hole. The magnetic diaphragm is elastically deformable and mounted to an outer face of the top plate to seal the through-hole. The coil unit is mounted to the second face of the substrate and aligned with the through-hole.
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