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US Patent 8075690 Diffuser gravity support

Patent 8075690 was granted and assigned to Applied Materials on December, 2011 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
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Current Assignee
Applied Materials
Applied Materials
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Date Filed
September 19, 2008
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Date of Patent
December 13, 2011
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Patent Application Number
12234359
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Patent Citations Received
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US Patent 11881384 Monolithic modular microwave source with integrated process gas distribution
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Patent Inventor Names
Robin L. Tiner
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Soo Young Choi
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Beom Soo Park
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Ernst Keller
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Jiri Kucera
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John M. White
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Michael Starr
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
8075690
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Patent Primary Examiner
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Rudy Zervigon
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