US Patent 8049515 Silicon MEMS resonators
Patent 8049515 was granted and assigned to Infineon Technologies on November, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 1, 2010
Date of Patent
November 1, 2011
Patent Application Number
12791495
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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