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US Patent 8033769 Loadlock designs and methods for using same

Patent 8033769 was granted and assigned to Novellus Systems on October, 2011 by the United States Patent and Trademark Office.

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Patent Citations Received
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US Patent 12094715 Abatement and strip process chamber in a load lock configuration
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US Patent 12074042 High-density substrate processing systems and methods
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US Patent 11948817 Robot for simultaneous substrate transfer
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US Patent 11894257 Single wafer processing environments with spatial separation
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US Patent 11883958 Robot apparatus including dual end effectors with variable pitch and methods
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Patent abstract

Provided are apparatuses and methods disclosed for wafer processing. Specific embodiments include dual wafer handling systems that transfer wafers from storage cassettes to processing modules and back and aspects thereof. Stacked independent loadlocks that allow venting and pumping operations to work in parallel and may be optimized for particle reduction are provided. Also provided are annular designs for radial top down flow during loadlock vent and pumpdown.

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US Patent 08033769 Loadlock designs and methods for using same US Patent 8033769 Loadlock designs and methods for using same

Infobox
Patent Number
0803376900
Patent Number
803376900
Edits on 26 Mar, 2023
"Entity importer update"
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edited on 26 Mar, 2023
Infobox
Is a
Patent
Patent
0
Current Assignee
Novellus Systems
Novellus Systems
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
080337690
Date of Patent
October 11, 2011
0
Patent Application Number
119985280
Date Filed
November 30, 2007
0
Patent Primary Examiner
‌
Michael Scott Lowe
0
Edits on 27 Sep, 2022
"Entity importer update"
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edited on 27 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
Novellus Systems
Novellus Systems
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
080337690
Date of Patent
October 11, 2011
0
Patent Application Number
119985280
Date Filed
November 30, 2007
0
Patent Primary Examiner
‌
Michael Scott Lowe
0
Edits on 13 Dec, 2021
"Created via: Entity Importer"
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created this topic on 13 Dec, 2021
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Infobox (+8 properties)
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 US Patent 08033769 Loadlock designs and methods for using same

Infobox
Is a
Patent
Patent
Current assignee
Novellus Systems
Novellus Systems
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
08033769
Date of patent
October 11, 2011
Patent application number
11998528
Date Filed
November 30, 2007
Patent primary examiner
‌
Michael Scott Lowe

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