US Patent 8027086 Roll to roll nanoimprint lithography
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Patent abstract
Apparatus and methods for a nano-patterning process to fabricate nanostructures. A roller type mold is used to continuously imprint nanostructures onto a flexible web or a rigid substrate. The process includes a coating and an imprinting module, which rotate the web synchronously. Liquid resist materials are used for imprinting and the patterns are set by thermal or UV curing. The process is used to produce bilayer metal wire-grid polarizers, organic solar cells, and organic light emitting diodes.
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Patent Inventor Names
Lingjie Jay Guo0
Se Hyun Ahn0
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US Patent 08027086 Roll to roll nanoimprint lithography US Patent 8027086 Roll to roll nanoimprint lithography
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Patent Number
080270860
Patent Number
80270860
Edits on 28 Mar, 2023
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Is a
Patent Jurisdiction
Patent Number
080270860
Date of Patent
September 27, 2011
0Patent Application Number
121003630
Date Filed
April 9, 2008
0Patent Primary Examiner
Edits on 13 Dec, 2021
Golden AI
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US Patent 08027086 Roll to roll nanoimprint lithography
Infobox
Is a
Patent jurisdiction
Patent number
08027086
Date of patent
September 27, 2011
Patent application number
12100363
Date Filed
April 9, 2008
Patent primary examiner
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