US Patent 8009343 Optical imaging device having at least one system diaphragm

Patent 8009343 was granted and assigned to Carl Zeiss SMT on August, 2011 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Carl Zeiss SMT

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

8009343

Date of Patent

August 30, 2011

Patent Application Number

10566196

Date Filed

July 2, 2004

Patent Primary Examiner

‌

Stephone B. Allen

Patent abstract

An optical imaging device (PL), in particular an objective for semiconductor lithography, is provided with at least one system diaphragm. The system diaphragm comprises a multiplicity of mobile plates, which are rotatably mounted. The plates have a spherical curvature.