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US Patent 8009286 Surface inspecting method and device

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Patent
Patent
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Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
80092860
Patent Inventor Names
Takehiro Takase0
Hisashi Isozaki0
Michihiro Yamazaki0
Takashi Kakinuma0
Fumio Koda0
Hiroyuki Maekawa0
Date of Patent
August 30, 2011
0
Patent Application Number
124428790
Date Filed
December 4, 2007
0
Patent Primary Examiner
‌
Tarifur Chowdhury
0
Patent abstract

A light source section outputs optical flux having two types of wavelength, which are a short wavelength and a long wavelength, while the intensity is made variable. The output from the first light intensity detecting section in irradiating the optical flux having a short wavelength is compared with the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength. A disappearance level near a point where the detected signal from the internal subject disappears is calculated. The first intensity of optical flux having a long wavelength is set to level higher than the disappearance level. Based on the output from the first light intensity detecting section obtained by the optical flux having a long wavelength of the first intensity, a subject inside the body to be detected is measured.

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