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Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takeshi Murakami0
Masahiro Inoue0
Shinji Nagai0
Takanobu Ishihara0
Hiroshi Sobukawa0
Kouji Kakizaki0
Date of Patent
August 23, 2011
0Patent Application Number
126057250
Date Filed
October 26, 2009
0Patent Primary Examiner
Patent abstract
An extreme ultraviolet light source apparatus comprises a target supply unit supplying a target into a vacuum chamber, a laser oscillator outputting a laser light into the vacuum chamber, a collector mirror outputting an extreme ultraviolet light outside by reflecting the extreme ultraviolet light emitted from the target being ionized as a plasma by irradiation with the laser light at a plasma luminescence point in the vacuum chamber, and an ion debris removal unit at least a part of which is located in an obscuration region including the plasma luminescence point.
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