Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shaun Pendo0
Rajiv Shah0
Date of Patent
August 23, 2011
0Patent Application Number
110869360
Date Filed
March 22, 2005
0Patent Primary Examiner
Patent abstract
A multilayer circuit includes a dielectric base substrate, conductors formed on the base substrate and a vacuum deposited dielectric thin film formed over the conductors and the base substrate. The vacuum deposited dielectric thin film is patterned using sacrificial structures formed by electroplating techniques. Substrates formed in this manner enable significant increases in circuit pattern miniaturization, circuit pattern reliability, interconnect density and significant reduction of over-all substrate thickness.
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