Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Atsushi Kobaru0
Date of Patent
August 16, 2011
Patent Application Number
12021619
Date Filed
January 29, 2008
Patent Primary Examiner
Patent abstract
An object of the present invention is to provide a synthesized signal forming method and an apparatus thereof for realizing both noise reduction and dosage reduction when synthesizing signals detected based on scans performed on a charged particle beam. In order to achieve the above object, with a method that synthesizes signals detected based on a plurality of scans performed on a charged particle beam to form a synthesized signal, a multiplication is performed among a plurality of signals obtained by the plurality of scans and, at the same time, for a multiplied signal, a calculation is performed in which an inverse of the number of previous scans is used as an exponent.
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