Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 16, 2011
Patent Application Number
11618687
Date Filed
December 29, 2006
Patent Primary Examiner
Patent abstract
An overlay vernier key includes a semiconductor substrate on which a cell region and a scribe lane region are defined, and a plurality of vernier patterns which are formed in the scribe lane region of the semiconductor substrate and arranged in a polygonal shape. Each of the vernier patterns has a hollow polygonal shape.
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