US Patent 7998539 Method of forming thin-film structure by oblique-angle deposition
Patent 7998539 was granted and assigned to National Chiao Tung University on August, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A method of forming thin-film structure by oblique-angle deposition is provided. The method includes the steps of: evaporating target source in a chamber by an electron beam evaporation system, and introducing process gas into the chamber and adjusting tilt angle of the evaporation substrate and controlling temperature in the chamber during evaporation to form thin-film on a evaporation substrate by oblique-angle deposition, and then annealing the evaporation substrate to form a thin-film having porous nanorod microstructure.
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US Patent 07998539 Method of forming thin-film structure by oblique-angle deposition US Patent 7998539 Method of forming thin-film structure by oblique-angle deposition
Infobox
Patent Number
0799853900
Patent Number
799853900
Edits on 31 Mar, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079985390
Date of Patent
August 16, 2011
0Patent Application Number
122898160
Date Filed
November 5, 2008
0Patent Primary Examiner
Edits on 23 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079985390
Date of Patent
August 16, 2011
0Patent Application Number
122898160
Date Filed
November 5, 2008
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
Edits made to:
Infobox (+8 properties)
US Patent 07998539 Method of forming thin-film structure by oblique-angle deposition
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07998539
Date of patent
August 16, 2011
Patent application number
12289816
Date Filed
November 5, 2008
Patent primary examiner
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