Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mun Hwan Kim0
Date of Patent
July 26, 2011
Patent Application Number
12641391
Date Filed
December 18, 2009
Patent Primary Examiner
Patent abstract
A method of manufacturing a back side illumination image sensor is provided. The method can include forming an ion implantation layer in a front side of a first substrate, forming a photodetector and a readout circuit on the first substrate, forming an interlayer dielectric layer and a metal line on the front side of the first substrate, bonding a second substrate with the front side of the first substrate, removing a lower portion of the first substrate on the basis of the ion implantation layer, performing an annealing process with respect on a back side of the first substrate, and forming a microlens over the photodetector.
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