US Patent 7981789 Feature patterning methods and structures thereof
Patent 7981789 was granted and assigned to Infineon Technologies on July, 2011 by the United States Patent and Trademark Office.
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Patent abstract
Methods of patterning features, methods of manufacturing semiconductor devices, and semiconductor devices are disclosed. In one embodiment, a method of patterning a feature includes forming a first portion of the feature in a first material layer. A second portion of the feature is formed in the first material layer, and a third portion of the feature is formed in a second material layer.
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US Patent 07981789 Feature patterning methods and structures thereof US Patent 7981789 Feature patterning methods and structures thereof
Infobox
Patent Number
0798178900
Patent Number
798178900
Edits on 7 Apr, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079817890
Date of Patent
July 19, 2011
0Patent Application Number
122716060
Date Filed
November 14, 2008
0Patent Primary Examiner
Edits on 23 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079817890
Date of Patent
July 19, 2011
0Patent Application Number
122716060
Date Filed
November 14, 2008
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
Edits made to:
Infobox (+8 properties)
US Patent 07981789 Feature patterning methods and structures thereof
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07981789
Date of patent
July 19, 2011
Patent application number
12271606
Date Filed
November 14, 2008
Patent primary examiner
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