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US Patent 7980135 Microelectromechanical gyroscope with self-test function and control method

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Patent
Patent
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Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
79801351
Patent Inventor Names
Luciano Prandi1
Carlo Caminada1
Ernesto Lasalandra1
Date of Patent
July 19, 2011
1
Patent Application Number
120307421
Date Filed
February 13, 2008
1
Patent Primary Examiner
Hezron Williams
Hezron Williams
1
Patent abstract

A microelectromechanical gyroscope having a microstructure that includes a first mass and a second mass, wherein the first mass is oscillatable according to a first axis and the second mass is constrained to the first mass so as to be drawn along by the first mass according to the first axis and to oscillate according to a second axis, in response to a rotation of the microstructure, a driving device coupled to the microstructure to maintain the first mass in oscillation at the driving frequency, and a reading device that detects displacements of the second mass according to the second axis. The gyroscope is provided with a self-test actuation system coupled to the second mass for applying an electrostatic force at the driving frequency so as to move the second mass according to the second axis.

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