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US Patent 7980115 Self-calibrating laser semiconductor accelerometer

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Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7980115
Date of Patent
July 19, 2011
Patent Application Number
12156274
Date Filed
May 30, 2008
Patent Citations Received
‌
US Patent 11754591 Vibrating beam accelerometer with pressure damping
Patent Primary Examiner
Hezron Williams
Hezron Williams
Patent abstract

A self-calibrating laser accelerometer system that continuously removes bias errors from acceleration measurements under dynamic operating conditions has a frame with a pair of essentially identical mass modulated accelerometers positioned within the frame. Each accelerometer includes a proof mass mounted to the sensing element frame by a flexure suspension. The proof mass is arranged to rotate about an output axis in response to acceleration of the sensing element frame along an input axis. The first proof mass includes a secondary mass that is movable between a first stable position on a first side of the output axis and a second stable position on a second side of the output axis to provide mass modulation of the first proof mass and to provide a selectively reversible polarity to the input axis and to provide self-calibration of bias.

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