US Patent 7978338 Compound reference interferometer
Patent 7978338 was granted and assigned to Zygo Corporation on July, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 14, 2009
Date of Patent
July 12, 2011
Patent Application Number
12541325
Patent Inventor Names
Leslie L. Deck
1
Xavier Colonna De Lega
1
Peter De Groot
1
Jan Liesener
1
Mark Davidson
1
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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