US Patent 7976633 Device and method of forming film

Patent 7976633 was granted and assigned to Seiko Epson on July, 2011 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Seiko Epson

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7976633

Date of Patent

July 12, 2011

Patent Application Number

11326906

Date Filed

January 6, 2006

Patent Primary Examiner

‌

Ram N Kackar

Patent abstract

A film forming device includes a mask member that is made of silicon and has first openings of predetermined patterns; a magnetic member that is made of a magnetic material and has a second opening, and that is aligned with the mask member so that the first openings are arranged in the second opening in plan view of the second opening; and a substrate holding member that generates magnetic force between the magnetic member and itself in order to adhere the mask member and a substrate to each other. The mask member and the substrate are interposed between the magnetic member and the substrate holding member in this order from the magnetic member.