US Patent 7974729 Server device and program with sub-recipe measurement communication
Patent 7974729 was granted and assigned to Tokyo Electron on July, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 9, 2007
0
Date of Patent
July 5, 2011
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Patent Application Number
12375590
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Patent Inventor Names
Noriaki Koyama
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Masashi Takahashi
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Minoru Obata
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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