US Patent 7969580 Method and system for step-and-align interference lithography
Patent 7969580 was granted and assigned to Industrial Technology Research Institute on June, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 7, 2008
Date of Patent
June 28, 2011
Patent Application Number
12266668
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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