US Patent 7969572 Particle monitor system and substrate processing apparatus

Patent 7969572 was granted and assigned to Tokyo Electron on June, 2011 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7969572

Date of Patent

June 28, 2011

Patent Application Number

12015156

Date Filed

January 16, 2008

Patent Primary Examiner

‌

L. G. Lauchman

Patent abstract

A particle monitor system that can detect fine particles in a substrate processing apparatus. The substrate processing apparatus has a chamber in which a substrate is housed and subjected to processing, a dry pump that exhausts gas out of the chamber, and a bypass line that communicates the chamber and the dry pump together. The particle monitor system has a laser light oscillator that irradiates laser light toward a space in which the particles may be present, and a laser power measurement device that is disposed on an optical path of the laser light having passed through the space and measures the energy of the laser light.