US Patent 7969262 Reduction of air damping in MEMS device
Patent 7969262 was granted and assigned to Epcos Ag on June, 2011 by the United States Patent and Trademark Office.
Name
# Contributions
Last Contribution
Find more entities like US Patent 7969262 Reduction of air damping in MEMS device
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
By using this site, you agree to our Terms of Service.