Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kuntack Lee0
Imsoo Park0
Date of Patent
June 28, 2011
0Patent Application Number
126560840
Date Filed
January 15, 2010
0Patent Primary Examiner
Patent abstract
A method of forming a pattern structure includes forming a thin film pattern on a substrate, the thin film pattern including depression portions with first bottom widths, forming a protection layer on the thin film pattern by implanting ions into the thin film pattern, and etching a lower portion of the thin film pattern selectively using the protection layer as a mask to increase the first bottom widths of the depression portions into second bottom widths.
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