Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tatsuya Honda0
Toshiyuki Isa0
Yasuhiro Jinbo0
Date of Patent
June 28, 2011
0Patent Application Number
120193610
Date Filed
January 24, 2008
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An object of the invention is to provide a method for manufacturing semiconductor devices that are flexible in which elements fabricated using a comparatively low-temperature (less than 500° C.) process are separated from a substrate. After a molybdenum film is formed over a glass substrate, a molybdenum oxide film is formed over the molybdenum film, a nonmetal inorganic film and an organic compound film are stacked over the molybdenum oxide film, and elements fabricated by a comparatively low-temperature (less than 500° C.) process are formed using existing manufacturing equipment for large glass substrates, the elements are separated from the glass substrate.
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