US Patent 7966585 Selective shielding for multiple exposure masks
Patent 7966585 was granted and assigned to Mentor Graphics on June, 2011 by the United States Patent and Trademark Office.
All edits
Edits on 28 Nov, 2023
Golden AI
Edits made to:
Article (+417 characters)
Article
Patent abstract
A system for preparing mask data to create a desired layout pattern on a wafer with a multiple exposure photolithographic printing system. In one embodiment, boundaries of features are expanded to create shields for those features, or portions thereof, that are not oriented in a direction that are printed with greater fidelity by an illumination pattern used in the multiple exposure printing system.
Edits on 16 Jul, 2023
Golden AI
Edits made to:
Infobox (+1/-1 properties)
US Patent 07966585 Selective shielding for multiple exposure masks US Patent 7966585 Selective shielding for multiple exposure masks
Infobox
Patent Number
0796658500
Patent Number
796658500
Edits on 6 Apr, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079665850
Date of Patent
June 21, 2011
0Patent Application Number
116104140
Date Filed
December 13, 2006
0Patent Primary Examiner
Edits on 28 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079665850
Date of Patent
June 21, 2011
0Patent Application Number
116104140
Date Filed
December 13, 2006
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
Edits made to:
Infobox (+8 properties)
US Patent 07966585 Selective shielding for multiple exposure masks
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07966585
Date of patent
June 21, 2011
Patent application number
11610414
Date Filed
December 13, 2006
Patent primary examiner
Find more entities like US Patent 7966585 Selective shielding for multiple exposure masks
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
By using this site, you agree to our Terms of Service.