Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Dan B. Millward0
Date of Patent
June 21, 2011
0Patent Application Number
117039110
Date Filed
February 8, 2007
0Patent Primary Examiner
Patent abstract
Block copolymers can be self-assembled and used in methods as described herein for sub-lithographic patterning, for example. The block copolymers can be diblock copolymers, triblock copolymers, multiblock copolymers, or combinations thereof. Such methods can be useful for making devices that include, for example, sub-lithographic conductive lines.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.