Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yair Ein-Eli0
David Starosvetsky0
Esta Abelev0
Eugene Rabkin0
Date of Patent
June 21, 2011
0Patent Application Number
105517140
Date Filed
April 4, 2004
0Patent Primary Examiner
Patent abstract
A composition that rapidly passivates copper-containing surface to yield a uniform layer of insoluble copper oxide, the composition being useful in chemical-mechanical planarization of copper-containing surfaces is disclosed. The composition is a solution having a pH of equal to or greater than 9 and having an oxidation potential sufficient to oxidize the surface to form non-soluble copper oxides. Also disclosed are methods of making and using the composition.
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