US Patent 7963401 Atmospheric pressure microwave plasma treated porous membranes
Patent 7963401 was granted and assigned to Entegris on June, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 28, 2007
Date of Patent
June 21, 2011
Patent Application Number
12295727
Patent Inventor Names
Jijun Ge
0
Alketa Gjoka
0
Jieh-Hwa Shyu
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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