Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuuta Nakaya0
Takeshi Takano0
Xiaoyu Mi0
Yu Yonezawa0
Naoyuki Mishima0
Nobuhisa Aoki0
Takeaki Shimanouchi0
Date of Patent
June 14, 2011
Patent Application Number
12010243
Date Filed
January 23, 2008
Patent Primary Examiner
Patent abstract
A drive control method for a micro machine device is provided. The micro machine device is made up of first and second electrodes opposed to each other and a dielectric layer disposed between them. The drive control method includes the steps of applying a control voltage between the first and the second electrodes so that an electrostatic force is exerted on the first and the second electrodes for displacing the first or the second electrode, and switching polarity of the control voltage at a predetermined period or a shorter period.
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