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US Patent 7957066 Split field inspection system using small catadioptric objectives
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Is a
Patent
Date Filed
July 29, 2008
Date of Patent
June 7, 2011
Patent Application Number
12220983
Patent Citations Received
US Patent 12072606 Protective coating for nonlinear optical crystal
0
US Patent 11923185 Method of fabricating a high-pressure laser-sustained-plasma lamp
0
US Patent 11978620 Swirler for laser-sustained plasma light source with reverse vortex flow
0
US Patent 12015046 Back-illuminated sensor with boron layer deposited using plasma atomic layer deposition
0
US Patent 11690162 Laser-sustained plasma light source with gas vortex flow
0
US Patent 11761969 System and method for analyzing a sample with a dynamic recipe based on iterative experimentation and feedback
US Patent 11776804 Laser-sustained plasma light source with reverse vortex flow
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
7957066
Patent Primary Examiner
Jordan M. Schwartz
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