Patent attributes
The present invention relates to an optical part holding member made of ceramic and a production method thereof, and provides an effective permeability to prevent dew condensation. The optical part holding member is made of a silicon nitride ceramic base composite material to hold an optical part, which is produced through a process of nitriding in which silicon is caused to react with nitrogen. By using the silicon nitride ceramic base composite material containing silicon carbide and an iron compound, an airflow volume of 50 ml or more per minute is achieved in an effective airflow area of 1.5 cm2 when an air pressure is added with a pressure difference of 0.4 MPa between both surfaces of a sample of the silicon nitride ceramic base composite material having 1 mm thickness, and the optical part holding member having effective permeability to prevent dew condensation is obtained.
