US Patent 7947568 Method of manufacturing semiconductor device
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Edits on 28 Nov, 2023
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Patent abstract
A method of manufacturing a semiconductor device includes a process of forming a STI trench in a substrate, a process of forming a thermal oxide film on a sidewall and a bottom surface of the STI trench, a process of performing a plasma treatment on a surface of the thermal oxide film that is located at a bottom portion of the STI trench, and a process of forming an insulating film in the STI trench using a CVD method.
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US Patent 07947568 Method of manufacturing semiconductor device US Patent 7947568 Method of manufacturing semiconductor device
Infobox
Patent Number
0794756800
Patent Number
794756800
Edits on 29 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079475680
Date of Patent
May 24, 2011
0Patent Application Number
125484710
Date Filed
August 27, 2009
0Patent Primary Examiner
Edits on 23 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079475680
Date of Patent
May 24, 2011
0Patent Application Number
125484710
Date Filed
August 27, 2009
0Patent Primary Examiner
Edits on 7 Dec, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07947568 Method of manufacturing semiconductor device
Infobox
Is a
Patent jurisdiction
Patent number
07947568
Date of patent
May 24, 2011
Patent application number
12548471
Date Filed
August 27, 2009
Patent primary examiner
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