Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takefumi Saito0
Date of Patent
May 24, 2011
0Patent Application Number
119015110
Date Filed
September 18, 2007
0Patent Primary Examiner
Patent abstract
When forming an opening conforming to a groove of a quartz resonator in a metal film serving as a mask of the quartz resonator by conducting etching, the outer periphery of the metal film is wavingly etched. Therefore, when the groove is formed on the quartz resonator, the quartz resonator is formed according to the above-described metal film, which results in appearance defects or dimension defects. In order to solve the problems, the outer shape of the metal film is formed smaller than the outer shape of the quartz resonator before forming the opening conforming to the groove of the quartz resonator in the metal film, then etching of the metal film and etching of the quartz resonator are performed.
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