Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tai-Kweon Lim0
Hee-Suk Kim0
Date of Patent
May 17, 2011
Patent Application Number
12211349
Date Filed
September 16, 2008
Patent Citations Received
Patent Primary Examiner
Patent abstract
An apparatus and method of sensing leakage of chemical liquid is provided. The apparatus for sensing leakage of chemical liquid, includes a sensing unit measuring a flow rate of chemical liquid being supplied to a process chamber, a process control unit judging whether leakage of the chemical liquid has occurred using the measured flow rate of the chemical liquid and generating a control signal, and an equipment control unit receiving an input of the control signal and controlling an operation of equipment.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.