Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Nam Joo Kim0
Date of Patent
May 10, 2011
0Patent Application Number
126268330
Date Filed
November 27, 2009
0Patent Primary Examiner
Patent abstract
Disclosed is a semiconductor device which includes a substrate having an air layer or void therein, an interlayer dielectric film above the substrate, and a metal wiring having a spiral structure on the interlayer dielectric film corresponding to or over the air layer. The semiconductor device exhibits reduced parasitic capacitance between the metal wiring (used as an inductor) and the substrate, thereby improving a self-resonance frequency as well as an applicable frequency band of the inductor.
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