Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kazuhito Nishimura0
Hideki Sasaoka0
Date of Patent
May 3, 2011
Patent Application Number
12334832
Date Filed
December 15, 2008
Patent Primary Examiner
Patent abstract
A deposition apparatus includes: a first electrode for placing a processing object; a second electrode for generating plasma with the first electrode, the second electrode being opposed to the first electrode; and a heat flow control heat transfer part for drawing heat from the processing object to generate a heat flow from a central area to a peripheral area of the processing object.
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