Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Marc Schaepkens0
Wanxue Zeng0
David Michael Rusinko, Jr.0
Date of Patent
April 19, 2011
0Patent Application Number
122040790
Date Filed
September 4, 2008
0Patent Primary Examiner
Patent abstract
An article with an etch resistant coating is disclosed. The article is a heating element, wafer carrier, or electrostatic chuck. The article has a base substrate made of a ceramic or other material, and further has one or more electrodes for resistance heating or electromagnetic chucking or both. The eth resistant coating has a plurality of regions made from materials having different electrical volume resistivities, such that the overall coating has a bulk resistivity that can be tailored by varying the relative size of each region.
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