Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
JaeSung You0
Date of Patent
April 19, 2011
0Patent Application Number
123209390
Date Filed
February 9, 2009
0Patent Primary Examiner
Patent abstract
A crystallization method includes providing a substrate having a silicon thin film; positioning a laser mask having first to fourth blocks on the substrate, each block having a periodic pattern including a plurality of transmitting regions and a blocking region; and crystallizing the silicon thin film by irradiating a laser beam through the laser mask. A polycrystalline silicon film crystallized by this method is substantially free from a shot mark, and has uniform crystalline characteristics.
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