Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Geraud Jean-Michel Dubois0
Ratnam Sooriyakumaran0
Richard Anthony Dipietro0
Robert Dennis Miller0
Date of Patent
April 19, 2011
0Patent Application Number
114678620
Date Filed
August 28, 2006
0Patent Primary Examiner
Patent abstract
The present invention relates to a method for using compositions comprising poly-oxycarbosilane in step and flash imprint lithography. The imprinting compositions comprise a poly-oxycarbosilane polymer and a pore generator.
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