US Patent 7926439 Substrate processing apparatus

Patent 7926439 was granted and assigned to Dainippon Screen Mfg Co on April, 2011 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Dainippon Screen Mfg Co

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

79264390

Patent Inventor Names

Osamu Tamada0

Masakazu Sanada0

Date of Patent

April 19, 2011

Patent Application Number

118285140

Date Filed

July 26, 2007

Patent Primary Examiner

‌

Parviz Hassanzadeh

Patent abstract

A coating device includes a box-shaped processing chamber. Slits are respectively provided on four side surfaces of the processing chamber. A box-shaped housing is provided so as to surround the processing chamber. A space is formed between the processing chamber and the housing. A fan filter unit for forming downflow in the space is provided on the top of the housing. Air supplied to the fan filter unit is cleaned by the fan filter unit, and is supplied to the space. The air supplied to the space is supplied to the processing chamber through each of the slits in the processing chamber. This causes a twister-shaped air current to be generated within the processing chamber.