Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 12, 2011
Patent Application Number
11056855
Date Filed
February 11, 2005
Patent Primary Examiner
Patent abstract
A laser illuminator for use in an inspection system, such as a semiconductor wafer inspection system or photomask inspection system is provided. The gain medium in the illuminator comprises optical fiber, and amplification, beam splitting, frequency and/or bandwidth conversion, peak power reduction, and q-switching or mode locking may be employed. Certain constructs including doped fiber, gratings, saturable absorbers, and laser diodes are disclosed to provide enhanced illumination.
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