Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steven R. Collins0
Abron S. Toure0
Steven D. Bernstein0
Date of Patent
April 12, 2011
0Patent Application Number
125857330
Date Filed
September 23, 2009
0Patent Primary Examiner
Patent abstract
A structure including a TiW oxygen plasma mask, a photoresist mask above and in contact with the TiW oxygen plasma mask, a 2000 angstrom thick oxygen plasma vaporizable RuO0.8 electrode layer partially under and in contact with the TiW oxygen plasma mask, the RuO0.8 electrode layer not being completely covered by a pattern of the TiW oxygen plasma mask, a first side of a PZT ferroelectric layer in contact with the RuO0.8 electrode layer and a second RuO0.8 electrode layer in contact with a second side of the PZT ferroelectric layer.
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