Patent 7924433 was granted and assigned to Agilent Technologies on April, 2011 by the United States Patent and Trademark Office.
A measurement displacement system and method are described. The measurement displacement system comprises a sensor head configured to transmit input optical beams and to receive measurement beams. The system comprises a transmission grating configured to diffract the input optical beams into sub-beams comprising more than one diffraction order. The transmission grating is adapted move in a direction. The measurement displacement system comprises a reflective element configured to diffract the sub-beams from the transmission grating and to return the sub-beams to the transmission grating. The reflective element is substantially stationary relative to the sensor head and the transmission grating selectively recombines the sub-beams to form the measurement beams and returns the measurement beams to the sensor head.