Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chikako Yoshida0
Kentaro Kinoshita0
Date of Patent
April 12, 2011
0Patent Application Number
125460890
Date Filed
August 24, 2009
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A titanium oxide film, a nickel oxide film and a top electrode are formed on a bottom electrode, and a resistance element is constituted by the bottom electrode, the titanium oxide film, the nickel oxide film and the top electrode. A thickness of the titanium oxide film is 5 nm, and a thickness of the nickel oxide film is 60 nm. A rate of oxygen in nickel oxide composing the nickel oxide film is lower than a rate of oxygen in a stoichiometric composition.
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