Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert J. Small0
Date of Patent
April 12, 2011
0Patent Application Number
113507580
Date Filed
February 10, 2006
0Patent Primary Examiner
Patent abstract
A method of cleaning a substrate includes contacting a surface of a semiconductor substrate with a composition comprising a superacid. The semiconductor substrate may be a wafer.
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